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FOUP Cleaning Machine, Semiconductor Cleaning Malaysia


FP100 is an automatic centrifugal cleaning machine suitable for all types of wafer carriers (FOUP, FOSB & cassette). The FOUP to be cleaned is loaded, mounted, and fixed on the central axis of the chamber, which rotates 360° in both directions inside the closed cleaning chamber. The process consists of particle cleaning using DI water and drying through a combination of centrifugation and hot air.


Machine Size:L1780 x W1870 x H2550 mm
Machine Weight:1200KG
Cleaning Capacity:8PCS/Batch (12″ FOUP)